TY  - VIDEO
AU  - Dowell, Marla
AU  - Cromer, Christopher
AU  - Jones, Richard
AU  - Keenan, Darryl
AU  - Scott, Thomas
C2  - SME Tech. Note
DA  - 2000-01-01 00:01:00
LA  - en
PB  - SME Tech. Note
PY  - 2000
TI  - New Developments in Deep Ultraviolet Laser Metrology for Photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=229
ER  -