TY  - CONF
AU  - Allen, Richard
AU  - Patel, Ravi
AU  - Cresswell, Michael
AU  - Murabito, Christine
AU  - Park, Brandon
AU  - Edelstein, Monica
AU  - Linholm, Loren
C2  - ICMTS IEEE International Conference on Microelectronic Test Structures, Awaji Island, 1, JA
DA  - 2004-03-01 00:03:00
LA  - en
PB  - ICMTS IEEE International Conference on Microelectronic Test Structures, Awaji Island, 1, JA
PY  - 2004
TI  - Recent Developments in Producing Test-structures for Use as Critical Dimension Reference Materials
ER  -