TY  - CONF
AU  - Bunday, B
AU  - Bishop, M
AU  - Mccormack, D
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Vorburger, Theodore
AU  - Orji, Ndubuisi
AU  - Allgair, J
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Santa Clara, CA, USA
DA  - 2004-05-01 00:05:00
LA  - en
M1  - 5375
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Santa Clara, CA, USA
PY  - 2004
TI  - Determination of Optimal Parameters for CD-SEM Measurement of Line Edge Roughness
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822538
ER  -