TY - JOUR AU - Yarimbiyik, Emre AU - Schafft, Harry AU - Allen, Richard AU - Zaghloul, Mona AU - Blackburn, David C2 - Microelectronics Reliability DA - 2006-07-01 00:07:00 LA - en M1 - 46 PB - Microelectronics Reliability PY - 2006 TI - Modeling and Simulation of Resistivity of Nanometer Scale Copper ER -