TY  - CONF
AU  - Keller, Robert
AU  - Volkert, Cynthia
AU  - Geiss, Roy
AU  - Slifka, Andrew
AU  - Read, David
AU  - Barbosa, Nicholas
AU  - Monig, Reiner
C2  - Advanced Metallization Conf., Proc., Colorado Springs, CO, USA
DA  - 2005-09-01 00:09:00
LA  - en
M1  - 21
PB  - Advanced Metallization Conf., Proc., Colorado Springs, CO, USA
PY  - 2005
TI  - Electrical Methods for Mechanical Characterization of Interconnect Thin Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50210
ER  -