TY  - CONF
AU  - Panchawagh, Hrishikesh
AU  - Serrell, David
AU  - Faheem, Faheem
AU  - Herrmann, Cari
AU  - Finch, Dudley
AU  - Mahajan, Roop
C2  - Microtechnologies inb Medicine and Biology, Oahu, HI, USA
DA  - 2005-11-05 00:11:00
DO  - https://doi.org/10.1115/IMECE2005-82528
LA  - en
PB  - Microtechnologies inb Medicine and Biology, Oahu, HI, USA
PY  - 2005
TI  - Packaging of In-Plane Micro-Actuators for BioMEMS Applications
ER  -