TY - JOUR AU - Zhang, Nien AU - Postek, Michael AU - Larrabee, Robert C2 - Metrologia DA - 1996-01-01 00:01:00 LA - en M1 - 34 PB - Metrologia PY - 1996 TI - Statistical Models for Estimating the Measurement of Pitch in Metrology Instruments ER -