TY  - CONF
AU  - Silver, Richard
AU  - Jensen, Carsten
AU  - Tsai, V
AU  - Fu, Joseph
AU  - Villarrubia, John
AU  - Teague, E
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA, USA
DA  - 1998-06-01 00:06:00
LA  - en
M1  - 3332
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XII, Bhanwar Singh, Editor, Santa Clara, CA, USA
PY  - 1998
TI  - Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line
ER  -