TY  - JOUR
AU  - Glembocki, O
AU  - Tuchman, J
AU  - Dagata, John
AU  - Ko, K
AU  - Pang, S
AU  - Stutz, C
C2  - Applied Physics Letters
DA  - 1998-01-01 00:01:00
LA  - en
M1  - 73(1)
PB  - Applied Physics Letters
PY  - 1998
TI  - Electronic Properties of GaAs Surfaces Etched in an Electron Cyclotron Resonance Source and Chemically Passivated Using P2S5
ER  -