TY  - JOUR
AU  - Lowney, J
AU  - Postek, Michael
AU  - Jones, Samuel
AU  - Mayo, S
AU  - Cresswell, Michael
C2  - Scanning
DA  - 1998-04-01 00:04:00
LA  - en
M1  - 20(3)
PB  - Scanning
PY  - 1998
TI  - Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology
ER  -