TY  - CONF
AU  - Dixson, Ronald
AU  - Vorburger, Theodore
AU  - Sullivan, P
AU  - Tsai, V
AU  - Mcwaid, T
C2  - Proceedings of American Society for Precision Engineering, , USA
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 14
PB  - Proceedings of American Society for Precision Engineering, , USA
PY  - 1996
TI  - Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated AFM
ER  -