TY  - CONF
AU  - Koning, R
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Renegar, Thomas
AU  - Vorburger, Theodore
AU  - Tsai, V
AU  - Postek, Michael
C2  - Proceedings of SPIE, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, Fernando L. Podio, Editor, Denver, CO, USA
DA  - 1999-11-01 00:11:00
LA  - en
M1  - 3806
PB  - Proceedings of SPIE, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, Fernando L. Podio, Editor, Denver, CO, USA
PY  - 1999
TI  - Step-height Metrology for Data Storage Applications
ER  -