TY  - CONF
AU  - Dixson, Ronald
AU  - Sullivan, N.
AU  - Schneir, J
AU  - Mcwaid, T
AU  - Tsai, V
AU  - Prochazka, J
AU  - Young, M.
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, , USA
DA  - 1996-05-01 00:05:00
LA  - en
M1  - 2725
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, , USA
PY  - 1996
TI  - Measurement of a CD and Sidewall Angle Artifact with Two Dimensional CD AFM Metrology
ER  -