TY  - CONF
AU  - Damazo, Bradley
AU  - Gilsinn, James
AU  - Silver, Richard
AU  - Zhou, Hui
C2  - World Automation Congress (WAC) 2002 as Part of the International Symposium on Robotics & Applications (ISORA), Orlando, FL, USA
DA  - 2002-06-13 00:06:00
LA  - en
PB  - World Automation Congress (WAC) 2002 as Part of the International Symposium on Robotics & Applications (ISORA), Orlando, FL, USA
PY  - 2002
TI  - A Macro-Micro Motion System for a STM
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=821683
ER  -