TY  - JOUR
AU  - Calleja, M
AU  - Anguita, J
AU  - Garcia, R
AU  - Birkelund, K
AU  - Perez-murano, F
AU  - Dagata, John
C2  - Nanotechnology
DA  - 1999-03-01 00:03:00
LA  - en
M1  - 10(1)
PB  - Nanotechnology
PY  - 1999
TI  - Nanometre-scale Oxidation of Silicon Surfaces by Dynamic Force Microscopy: Reproducibility, Kinetics and Nanofabrication
ER  -