TY  - CONF
AU  - Silver, Richard
AU  - Potzick, James
AU  - Scire, Fredric
AU  - Evans, Christopher
AU  - McGlauflin, Michael
AU  - Kornegay, Edward
AU  - Larrabee, Robert
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor, Santa Clara, CA, USA
DA  - 1997-07-01 00:07:00
LA  - en
M1  - 3050
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XI, Susan K. Jones, Editor, Santa Clara, CA, USA
PY  - 1997
TI  - A Method to Characterize Overlay Tool Misalignments and Distortions
ER  -