TY  - CONF
AU  - Cresswell, Michael
AU  - Penzes, William
AU  - Allen, Robert
AU  - Linholm, L
AU  - Ellenwood, C
AU  - Teague, E
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 1994-05-01 00:05:00
LA  - en
M1  - 2196
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 1994
TI  - Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
ER  -