TY  - CONF
AU  - Tan, W
AU  - Allen, Robert
AU  - Cresswell, Michael
AU  - Murabito, Christine
AU  - Park, B
AU  - Dixson, Ronald
AU  - Guthrie, William
C2  - International Conference on Microelectronic Test Structures, Leuven, 1, BE
DA  - 2005-04-04 00:04:00
LA  - en
PB  - International Conference on Microelectronic Test Structures, Leuven, 1, BE
PY  - 2005
TI  - Comparison of SEM and HRTEM CD-Measurements Extracted From Monocrystalline Tes-Structures Having Feature Linewidths From 40 nm to 240 nm
ER  -