TY  - CONF
AU  - Schneir, J
AU  - Mcwaid, T
AU  - Dixson, Ronald
AU  - Tsai, V
AU  - Villarrubia, John
AU  - Williams, Edwin
AU  - Fu, E
C2  - Proceedings of SPIE, Santa Clara, CA, USA
DA  - 1995-05-01 00:05:00
LA  - en
M1  - 2439
PB  - Proceedings of SPIE, Santa Clara, CA, USA
PY  - 1995
TI  - Progress on Accurate Metrology of Pitch, Height, Roughness, and Width Artifacts Using an Atomic Force Microscope
ER  -