TY  - JOUR
AU  - Chabot, Michelle
AU  - Moreland, John
AU  - Gao, Lan
AU  - Liou, Sy-hwang
AU  - Miller, C.
C2  - Journal of Microelectromechanical Systems
DA  - 2005-10-05 00:10:00
LA  - en
M1  - 14
PB  - Journal of Microelectromechanical Systems
PY  - 2005
TI  - Novel Fabrication of Micromechanical Oscillators With Nanoscale Sensitivity at Room Temperature
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31632
ER  -