TY  - CONF
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Guthrie, William
AU  - Linholm, Loren
AU  - Bogardus, H
AU  - pinillos, J Martinez de
AU  - ende, B Am
AU  - Murabito, Christine
AU  - Bennett, M
C2  - International Society for Optical Engineering (SPIE) Microlithology Symposium, March 3-8, 1
DA  - 2002-03-01 00:03:00
LA  - en
PB  - International Society for Optical Engineering (SPIE) Microlithology Symposium, March 3-8, 1
PY  - 2002
TI  - CD Reference Materials for Sub-Tenth Micrometer Applications
ER  -