TY  - CONF
AU  - Allen, Richard
AU  - Dixson, Ronald
AU  - Cresswell, Michael
AU  - Gutherie, William
AU  - Shulver, Byron
AU  - Bunting, Andrew
AU  - Stevenson, J.
AU  - Walton, Anthony
C2  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, USA
DA  - 2007-09-30 00:09:00
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, USA
PY  - 2007
TI  - CD Reference Materials Fabricated on Monolithic 200 mm Wafers for Automated Metrology Tool Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32654
ER  -