TY - CONF AU - Wallis, Thomas AU - Imtiaz, Atif AU - Nembach, Hans AU - Rice, Paul AU - Kabos, Pavel C2 - 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled Characterization and Metrology for ULSI Technology), Gaithersburg, MD, USA DA - 2007-03-27 00:03:00 LA - en PB - 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (formerly titled Characterization and Metrology for ULSI Technology), Gaithersburg, MD, USA PY - 2007 TI - Metrology for High-Frequency Nanoelectronics UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32626 ER -