TY - JOUR AU - Afridi, Muhammad AU - Jr., Allen Hefner AU - Berning, David AU - Hood, Colleen AU - Varma, Ankush AU - Jacob, Bruce AU - Semancik, Stephen C2 - Solid-State Electronics DA - 2004-06-24 00:06:00 LA - en M1 - 48 PB - Solid-State Electronics PY - 2004 TI - Mems-Based Embedded Sensor Virtual Components for SOC UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31578 ER -