TY  - JOUR
AU  - Djordjevic, Sophie
AU  - Roberts, J
AU  - Olthoff, James
C2  - Journal of Magnetohydrodynamics and Plasma Research
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 7
PB  - Journal of Magnetohydrodynamics and Plasma Research
PY  - 1996
TI  - Spatial and Time Characteristics of Low Temperature RF Plasmas for Materials Processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32421
ER  -