TY  - CONF
AU  - Ehrstein, James
AU  - Richter, Curt
AU  - Chandler-Horowitz, Deane
AU  - Vogel, Eric
AU  - Ricks, Donnie
AU  - Young, Chadwin
AU  - Spencer, Steve
AU  - Shah, Shweta
AU  - Maher, Dennis
AU  - Foran, Brendan
AU  - Diebold, Alain
AU  - Hung, Pui-Yee
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
PY  - 2003
TI  - Thickness Evaluation for 2nm SiO2 Films, a Comparison of Ellipsometric, Capacitance-Voltage and HRTEM Measurements
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31352
ER  -