TY - CONF AU - Liew, Li-Anne AU - Knappe, Svenja AU - Moreland, John AU - Robinson, Hugh AU - Hollberg, Leo AU - Kitching, John C2 - Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004), Maastricht, 1, NL DA - 2004-01-30 00:01:00 LA - en PB - Proceedings of the 17th Annual IEEE International Conference on Micro Electromechanical Systems (MEMS 2004), Maastricht, 1, NL PY - 2004 TI - Micromachined Alkali Atom Vapor Cells for Chip-Scale Atomic Clocks ER -