TY  - CONF
AU  - Allen, Richard
AU  - Hunt, Amy
AU  - Murabito, Christine
AU  - Park, Brandon
AU  - Guthrie, William
AU  - Cresswell, Michael
C2  - ICMTS IEEE International Conference on Microelectronic Test Structures, Leuven, 1, BE
DA  - 2005-04-18 00:04:00
LA  - en
PB  - ICMTS IEEE International Conference on Microelectronic Test Structures, Leuven, 1, BE
PY  - 2005
TI  - Extraction of Critical Dimension Reference Feature CDs from New Test Structure Using HRTEM Imaging
ER  -