TY - CONF AU - Li-Baboud, Ya-Shian AU - Eck, Brad Van AU - Simmon, Eric C2 - AEC/APC Symposium XVI, Westminster, CO, USA DA - 2004-09-23 00:09:00 LA - en PB - AEC/APC Symposium XVI, Westminster, CO, USA PY - 2004 TI - Running Out of Time: Improvements Required In Current Semiconductor Factory and Equipment Clock Synchronization for Supporting Future Real-Time Data Collection ER -