TY  - CONF
AU  - Allen, Richard
AU  - Patrick, Heather
AU  - Bishop, Michael
AU  - Germer, Thomas
AU  - Dixson, Ronald
AU  - Gutherie, William
AU  - Cresswell, Michael
C2  - IEEE ICMTS International Conference on Microelectronic Test Structures, Tokyo, 1, JA
DA  - 2007-03-22 00:03:00
LA  - en
PB  - IEEE ICMTS International Conference on Microelectronic Test Structures, Tokyo, 1, JA
PY  - 2007
TI  - Study of Test Structures for Use as Reference Material in Optical Critical Dimension Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32593
ER  -