TY  - CONF
AU  - Burgess, D
AU  - Maslar, J.
AU  - Hurst, W
AU  - Moore, E
AU  - Kimes, W
AU  - Fink, R
AU  - Nguyen, Nhan
C2  - Characterization and Metrology for ULSI Technology: 2005, Richardson, TX, USA
DA  - 2005-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2005, Richardson, TX, USA
PY  - 2005
TI  - Atomic Layer Deposition - Process Models and Metrologies
ER  -