TY  - CONF
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Murabito, Christine
AU  - Dixson, Ronald
AU  - Bogardus, E.
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, USA
PY  - 2003
TI  - Critical Dimension Calibration Standards for ULSI Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31314
ER  -