TY - CONF AU - Moreland, John AU - Hubbard, T. C2 - Proc. 2001 Microelectromechanical Systems Conference, Berkeley, CA, USA DA - 2001-08-24 00:08:00 LA - en PB - Proc. 2001 Microelectromechanical Systems Conference, Berkeley, CA, USA PY - 2001 TI - High Q resonating cantilevers for in situ measurements of ferromagnetic films ER -