TY  - JOUR
AU  - Li, Qiliang
AU  - Koo, Sang-Mo
AU  - Edelstein, Monica
AU  - Suehle, John
AU  - Richter, Curt
C2  - Nanotechnology
DA  - 2007-07-06 00:07:00
LA  - en
M1  - 18
PB  - Nanotechnology
PY  - 2007
TI  - Silicon Nanowire Electromechanical Switches for Logic Device Application
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32567
ER  -