TY - CONF AU - Koo, Sang-Mo AU - Li, Qiliang AU - Edelstein, Monica AU - Richter, Curt AU - Vogel, Eric C2 - 2005 International Semiconductor Device Research Symposium, Bethesda, MD, USA DA - 2005-12-09 00:12:00 LA - en PB - 2005 International Semiconductor Device Research Symposium, Bethesda, MD, USA PY - 2005 TI - Silicon Nanowire Field Effect Transistor Test Structures Fabricated by Top-down Approaches ER -