TY  - JOUR
AU  - Lita, Bogdan
AU  - Pluchery, O
AU  - Opila, R
AU  - Chabal, Y
AU  - Bunea, G.
AU  - Holman, J
AU  - Bekos, E
C2  - Journal of Vacuum Science and Technology B
DA  - 2004-08-01 00:08:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology B
PY  - 2004
TI  - Wet chemical cleaning of plasma oxide grown on heated (001) InP surfaces
ER  -