TY  - JOUR
AU  - Mayo, Santos
AU  - Fassett, John
AU  - Kingston, H.
AU  - Walker, R.
C2  - Analytical Chemistry
DA  - 1990-02-01 00:02:00
LA  - en
M1  - 62
PB  - Analytical Chemistry
PY  - 1990
TI  - Measurement of Vanadium Impurity in Oxygen-Implanted Silicon by Isotope Dilution and Resonance Ionization Mass Spectrometry
ER  -