TY  - GEN
AU  - Belzer, Barbara
AU  - Eberhardt, K
AU  - Chandler-Horowitz, Deane
AU  - Ehrstein, James
AU  - Durgapal, P.
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1998-04-01 00:04:00
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1998
TI  - Semiconductor Measurement Technology: Thin Film Reference Materials Development; Final Report for CRADA CN-1364
ER  -