TY  - CONF
AU  - Sayan, Safak
AU  - Croft, Mark
AU  - Nguyen, Nhan
AU  - Emge, Tom
AU  - Ehrstein, James
AU  - Levin, Igor
AU  - Suehle, John
AU  - Bartynski, Robert
AU  - Garfunkel, Eric
C2  - 2005 International Conference on Characterization and Metrology for ULSI Technology, Dallas, TX, USA
DA  - 2005-09-28 00:09:00
LA  - en
PB  - 2005 International Conference on Characterization and Metrology for ULSI Technology, Dallas, TX, USA
PY  - 2005
TI  - The Relation between Crystalline Phase, Electronic Structure and Dielectric Properties in High-K Gate Stacks
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32018
ER  -