TY - GEN AU - Knight, Stephen AU - Martinez, Joaquin AU - Buckley, Michele C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2003-01-01 00:01:00 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2003 TI - Office of Microelectronics Programs 2003 Programs, Activities, and Accomplishments ER -