TY  - JOUR
AU  - Guillaume, Nadine
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Lahti, Markku
AU  - Linholm, Loren
AU  - Zaghloul, Mona
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2004-05-01 00:05:00
LA  - en
M1  - 17
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2004
TI  - Non-contact Electrical CD Metrology Sensor for Chrome Photomasks Featuring a Low Temperature Co-fired Ceramic Technology
ER  -