TY  - CONF
AU  - Rennex, Brian
AU  - Ehrstein, James
AU  - Scace, Robert
C2  - Extended Abstracts of the Electrochemical Society, Miami Beach, FL, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Extended Abstracts of the Electrochemical Society, Miami Beach, FL, USA
PY  - 1994
TI  - Development of a Standard Reference Material for Measurement of Interstitial Oxygen Concentration in Semiconductor Silicon by Infrared Absorption
ER  -