TY  - CONF
AU  - Allen, Richard
AU  - Vogel, Eric
AU  - Linholm, Loren
AU  - Cresswell, Michael
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Goteborg, 1, SW
DA  - 1999-04-01 00:04:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Goteborg, 1, SW
PY  - 1999
TI  - Sheet and Line Resistance of Patterned SOI Surface Film CD Reference Materials as a Function of Substrate Bias
ER  -