TY  - JOUR
AU  - Allen, Richard
AU  - ende, B Am
AU  - Cresswell, Michael
AU  - Murabito, Christine
AU  - Headley, T
AU  - Guthrie, William
AU  - Linholm, Loren
AU  - Hood, Colleen
AU  - Bogardus, E.
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2003-05-01 00:05:00
LA  - en
M1  - 16
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2003
TI  - Test Structures for Referencing Electrical Linewidth Measurements to Silicon Lattice Parameters Using HRTEM
ER  -