TY  - CONF
AU  - Richter, Curt
AU  - Nguyen, Nhan
AU  - Alers, G
AU  - Guo, X
AU  - Wang, Xiaorui
AU  - Ma, T
AU  - Tamagawa, T
C2  - Workbook of the 30th IEEE Semiconductor Interface Specialist Conference, Charleston, SC, USA
DA  - 1999-12-02 00:12:00
LA  - en
PB  - Workbook of the 30th IEEE Semiconductor Interface Specialist Conference, Charleston, SC, USA
PY  - 1999
TI  - Analytical Spectroscopic Ellipsometry of Ta<sub>2</sub>O<sub>5</sub> and TiO<sub>2</sub> for Use as High-k Gate Dielectrics
ER  -