TY  - CONF
AU  - Allen, Richard
AU  - Linholm, Loren
AU  - Cresswell, Michael
AU  - Hood, Colleen
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
DA  - 2000-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
PY  - 2000
TI  - A Novel Method for Fabricating CD Reference Materials with 100 nm Linewidths
ER  -