TY  - CONF
AU  - Roitman, Peter
AU  - Bagchee, S.
AU  - Krause, S.
AU  - Garcia, G.
AU  - McMarr, P.
AU  - Mrstik, B.
AU  - Hughes, H.
C2  - Proc.,  1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc.,  1997 Government Microcircuit Applications Conference (GOMAC), Las Vegas, NV, USA
PY  - 1997
TI  - Buried Oxide Defects in Low Dose SIMOX: Processing Conditions, Precipitates and Defects, and Detection Methods
ER  -