TY  - CONF
AU  - Richter, Curt
AU  - Nguyen, Nhan
AU  - Gusev, Evgeni
AU  - Zabel, T
AU  - Alers, G
C2  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 2001-02-01 00:02:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 2001
TI  - Optical and Electrical Thickness Measurements of Alternate Gate Dielectrics: a Fundamental Difference
ER  -