TY  - CONF
AU  - Allen, Richard
AU  - Cresswell, Michael
AU  - Linholm, Loren
C2  - 2003 ICMTS IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
DA  - 2003-03-31 00:03:00
LA  - en
PB  - 2003 ICMTS IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
PY  - 2003
TI  - Junction-Isolated Electrical Test Structures for Critical Dimension Calibration Standards
ER  -