TY - GEN AU - Ehrstein, James AU - Croarkin, C C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 1999-06-01 00:06:00 LA - en M1 - 260 PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 1999 TI - Standard Reference Materials: The Certification of 100 mm Diameter Silicon Resistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe Measurements ER -